1 Cassette (qty. 25) of 100 mm P Type (B-doped) Prime Grade Silicon Wafer <100>,

Description

1 Cassette (qty. 25) of 100 mm P Type (B-doped) Prime Grade Silicon Wafer <100>, SSP, 10-20 ohm-cm
1 Cassette (qty. 25) of 100 mm P Type (B-doped) SEMI Standard Prime Grade Silicon Wafer <100>, 10-20 ohm-cm, Single Side Polished, 4 inch Si Wafer Product SKU#: WA0806 Product Specifications Material: Single Crystal Silicon Wafer Growth Method: MCZ Orientation: <100> Diameter: 100 mm +/- 0.5 mm Thickness: 525 um +/- 20 um (SSP) Primary Flat Orientation: <110> +/-1 deg Primary Flat Length: 32.5 +/- 2.5 mm Secondary Flat Orientation: 90 deg from primary flat Secondary Flat Length: 18.0 +/- 2.0 mm Type/ Dopant: P/ Boron Thermal Expansion Coefficient: 2.6·10-6°C -1 Electrical Resistivity: 10-20 ohm-cm RRV: 8% (6mm) Oxygen Content: 1.6 x 10^18 atoms/cm3 Carbon Content: 0.5 ppm GBIR/ TTV: 5 µm WARP: 30 µm BOW: 30 µm Front Surface: CMP Polished, Ra < 0.5 nm (single side polished, SSP) LPD & COP Particles: <=20 @ >=0.3 um size Package: Packaged in a class 100 clean room environment, in cassettes of 25 wafers.
1 Cassette (qty. 25) of 100 mm P Type (B-doped) Prime Grade Silicon Wafer <100>, SSP, 10-20 ohm-cm
1 Cassette (qty. 25) of 100 mm P Type (B-doped) SEMI Standard Prime Grade Silicon Wafer <100>, 10-20 ohm-cm, Single Side Polished, 4 inch Si Wafer
Product SKU#: WA0806
Product Specifications
Material: Single Crystal Silicon Wafer
Growth Method: MCZ
Orientation: <100>
Diameter: 100 mm +/- 0.5 mm
Thickness: 525 um +/- 20 um (SSP)
Primary Flat Orientation: <110> +/-1 deg
Primary Flat Length: 32.5 +/- 2.5 mm
Secondary Flat Orientation: 90 deg from primary flat
Secondary Flat Length: 18.0 +/- 2.0 mm
Type/ Dopant: P/ Boron
Thermal Expansion Coefficient:
2.6·10
-6
°C
-1
Electrical Resistivity: 10-20 ohm-cm
RRV: 8% (6mm)
Oxygen Content: 1.6 x 10^18 atoms/cm3
Carbon Content: 0.5 ppm
GBIR/ TTV: 5 µm
WARP: 30 µm
BOW: 30 µm
Front Surface: CMP Polished, Ra < 0.5 nm (single side polished, SSP)
LPD & COP Particles: <=20 @ >=0.3 um size
Package: Packaged in a class 100 clean room environment, in cassettes of 25 wafers.
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